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Multi-chamber Integrated System

PVD Multi-chamber Integrated System


We can customize a multi-process chamber integrated system according to user needs, which is internationally called a multi-chamber Cluster system.

System components: single/multi-chip sampling/storage chamber, conduction chamber, multiple process chambers (different numbers/different functions/same functions, etc.), sputtering/evaporation system ion source auxiliary system, vacuum system, heating/cooling systems, gas transmission systems, fully automatic program control systems, etc.

Layout Dimensions: about 4200mm (W) * 4500mm (D) * 2400mm (H)

Power Supply: 50-70KW

Cooling Water Flow: 60-75L/min

Air Pressure: 6-7 bar

Gross Weight: 3.5-4 MT


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Please let us know your detailed inquiry, and we will feedback to you ASAP

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