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Three-target Magnetron Coating System

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Model: YM-MSH325-III-DCDCRF-SS

Introduction:

The three target magnetron sputtering coater is a laborator y-specific coater developed by our company. The equipment can be equipped with a DC power supply and an RF power supply, withpower ranging from 500W to 1000W. Compared with ordinary plasma sputtering, magnetron sputtering has the advantages of high energy and high speed, high coating rate, and is a typical high-speed and low-temperature sputtering. The magnetron target is equipped with a water-cooled inter-layer. The water cooler can effectively take away the heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time. The equipment has been compactly designed to achieve a balance between volume and performance, with beautiful appearance and comprehensive functions. The whole machine is controlled by a touch screen, with a builtin onebutton coating program, simple and easy to operate, and is an ideal equipment forpreparing thin films in the laboratory.

Specifications:

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